Electrostatic motor

Abstract

PURPOSE: To provide an electrostatic motor, which is equipped with mechanism which directly transmits the torque generated in a rotor electrode to the place where it is actually used. CONSTITUTION: In an electrostatic motor, which gets the driving force by the electrostatic attraction between a stator electrode 8 and a rotor electrode 8, the rotor electrode 8 is made at the surface of a substrate 5, and the stator electrode 9 is made in the substrate right below this rotor electrode 8. COPYRIGHT: (C)1992,JPO&Japio

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Cited By (6)

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    JP-2013503346-AJanuary 31, 2013アナログ ディヴァイスィズ インク電気容量を測定するためのシステム及び方法
    US-5493156-AFebruary 20, 1996Nec CorporationEquipment using a micro-actuator
    US-7602097-B2October 13, 2009Fujitsu LimitedMovable device
    US-8455928-B2June 04, 2013Semiconductor Energy Laboratory Co., Ltd.Micro electro mechanical device and manufacturing method thereof
    US-8759887-B2June 24, 2014Semiconductor Energy Laboratory Co., Ltd.Micro electro mechanical device and manufacturing method thereof
    US-8866499-B2October 21, 2014Analog Devices, Inc.System and method for measuring capacitance